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Rapid Sintering of Nanosilver Paste Using Current for attaching IGBT Chips

机译:使用电流快速烧结纳米银膏以连接IGBT芯片

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Sintering of nanosilver paste had been extensively studied as a lead-free die-attach solution for bonding semiconductor chips. In this paper, we developed a rapid way to sinter nanosilver paste for bonding insulated-gated-bipolartransistor (IGBT) using pulsed current. In this way, we firstly dried as-printed paste at 100 deg C in order to get rid of many volatile solvents that may form defects or voids during the outgassing of the paste. Then the dried paste was further heated by pulse current ranging from 1 kA to 2 kA for several seconds. The whole procedure was less than 5 min. We could obtain robust sintered die attachment for (1200V, 25A) IGBT from ABB (SIGC32T120R3LE) in a rapid way by pulsed current. The dieshear strength of the die attachment could reach up to 25-30 MPa. The cross-sectional morphology of the sintered die attachment was characterized by scanning electron microscopy. It was concluded that the current-assisted way could be used to sinter nanosilver paste rapidly for bonding real IGBT chips. This good news may benefit the wide usage of nanosilver paste in the future.
机译:纳米银浆的烧结已被广泛研究为用于粘合半导体芯片的无铅芯片附着解决方案。在本文中,我们开发了一种快速方法来烧结纳米银浆,以利用脉冲电流粘结绝缘栅双极晶体管(IGBT)。以这种方式,我们首先在100摄氏度下干燥了印刷后的糊状物,以去除可能在糊状物脱气期间形成缺陷或空隙的许多挥发性溶剂。然后,将干燥的糊状物通过1kA至2kA的脉冲电流进一步加热数秒。整个过程少于5分钟。我们可以通过脉冲电流快速从ABB(SIGC32T120R3LE)获得用于(1200V,25A)IGBT的坚固烧结模头附件。模具附件的模具剪切强度可以达到25-30 MPa。烧结的模具附件的横截面形态通过扫描电子显微镜表征。结论是,电流辅助方法可用于快速烧结纳米银浆,以粘结真正的IGBT芯片。这个好消息可能会有益于未来纳米银浆的广泛使用。

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