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Comparison of different technologies for the die attach of power semiconductor devices conducting active power cycling

机译:功率半导体器件进行有源功率循环的管芯连接不同技术的比较

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The three different die attach technologies soldering, silver sintering and transient liquid phase bonding (TLPB) were compared conducting active power cycling tests. The active power cycling method used was designed such that the temperature swing of the semiconductor die was held constant over the whole testing time. The TLPB interconnects consisting of the intermetallic phases Cu6Sn5 and Cu3Sn showed the highest life time followed by Ag sinter joints made applying a sintering pressure of 30 MPa showing almost the same life time. Even the pressure less sintered samples showed a much higher life time than the soldered interconnects made of SnAg3.5 solder. While the soldered samples failed due to solder fatigue, the silver sintered and TLPB samples showed failures like delaminations and cracks in the substrate rather than in the interconnects themselves.
机译:比较了三种不同的芯片连接技术:焊接,银烧结和瞬态液相键合(TLPB),以进行有功功率循环测试。设计使用的有功功率循环方法,使半导体管芯的温度摆幅在整个测试时间内保持恒定。由金属间相Cu6Sn5和Cu3Sn组成的TLPB互连件显示出最长的使用寿命,其后是施加30 MPa的烧结压力制成的Ag烧结接头,显示出几乎相同的寿命。即使是压力较低的烧结样品,其使用寿命也比由SnAg3.5焊料制成的焊接互连要长得多。尽管由于疲劳而使焊接样品失效,但银烧结和TLPB样品在基底而非互连本身中表现出诸如分层和裂纹之类的缺陷。

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