A Novel Cupped Solid-state Wave Gyroscope

摘要

Aiming at improving the Q-factor and simplifying the fabricating process of the cupped solid-state wave Gyroscope, a novel cupped solid-state wave gyroscope based on piezoelectric effect is presented in this paper. The sensor has a novel cupped metallic resonator comprises of a cone shell and eight thin flat beams. The working principle of the gyroscope is validated by FEM. Compared with conventional solid-stated gyroscopes, the novel structural features improve the Qfactor and simplify the fabricating process of the gyroscope. The prototypal gyroscope is fabricated and tested, the work mode frequency is about 3979Hz, and the Q-factor is over 8000 in atmosphere. The side-lobes in the output signal's FFT curve validate the novel design scheme.