The invention relates to the field of micro-sensors, and particularly to a novel MEMS technology-based, chip-level, resonant, acousto-optically coupled, solid-state wave gyroscope. The gyroscope integrates an acoustic surface wave-sensitive structure and a resonant microring resonator optical measurement structure, and applies said structures in a gyroscope. The acousto-optical effect is used to convert mechanical strain on a device crystal caused by a primary acoustic surface wave and a secondary acoustic wave caused by the Coriolis force into a change in refractive index of an optical waveguide etched on the device, causing an optical signal transmitted in the waveguide to diffract, thereby producing a frequency modulation. Meanwhile, a microresonator that uses the principle of resonance separates the frequency change introduced into the primary acoustic surface wave to obtain an output signal containing external angular velocity information. The quality factor of the resonant microring resonator forms a proportional relationship with the measurement resolution, increasing the magnitude of interface measurement resolution. At the same time that aspects such as sensitivity are increased and resolution improved, the performance indexes of the gyroscope are optimized, achieving improvement in the accuracy thereof.
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