Design and optimization of a compact, large amplification XY flexure-mechanism

摘要

This article presents the design methodology, optimization, and computational verification of a compact, high-gain planar XY flexure mechanism. The presented mechanism consists of a decoupled XY mechanism, and a modified Scott-Russel mechanism, which maintain linear XY motion, and amplify the input piezoelectric actuator (PEA) displacement respectively. Each mechanism offers the potential for use in isolation. When operated together, the combined mechanism is capable of nanometer scale precision and millimeter scale range in a vacuum-compatible design. The presented mechanism could therefore be used in micro-assembly operations including those performed in electron microscopes. The design methodology and mechanism models are presented, with the selected design computationally optimized and analyzed. By using a broad design space, and minimizing assumptions, the optimized mechanism produces workspace of approximately 930 × 940 μm from 15 μm of input displacement.