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A low-noise sub-500µW lorentz force based integrated magnetic field sensing system

机译:基于低噪声,低于500µW洛伦兹力的集成磁场传感系统

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This paper shows, for the first time, a complete magnetic field sensing system including a Lorentz-force sensor operating out of resonance coupled to an integrated circuit for sensing and actuating the device. Working out of resonance, the trade-off between maximum sensing bandwidth and minimum detectable magnetic field is overwhelmed, improving the resolution and enlarging the bandwidth. However, the reduction of signal amplitude makes the readout electronics a critical block. Measurements carried-out on the whole system show an achievable resolution of 180 nT·mA/√Hz over a 150-Hz bandwidth and an overall power consumption of 460 μW. The integrated readout circuit low-noise performance does not limit the resolution, which is set by the MEMS thermomechanical noise.
机译:本文首次展示了一个完整的磁场感应系统,该系统包括一个因共振而工作的洛伦兹力传感器,该传感器耦合到用于感测和驱动该装置的集成电路。为了避免共振,最大的感测带宽与最小的可检测磁场之间的权衡不堪重负,从而提高了分辨率并扩大了带宽。然而,信号幅度的减小使得读出电子设备成为关键的模块。在整个系统上进行的测量表明,在150Hz带宽上可实现180 nT·mA /√Hz的分辨率,总功耗为460μW。集成的读出电路的低噪声性能不会限制分辨率,而分辨率是由MEMS热机械噪声设置的。

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