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Electrostatic MEMS tunable split-ring resonators for THz filter applications

机译:用于THz过滤器应用的静电MEMS可调谐分流环谐振器

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We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.
机译:我们提出了一种新的RF-MEMS(射频 - 微电器机械系统)电容开关来构建可调太赫兹过滤器。静电致动在分流环谐振器内的内置电容以移位谐振频率,从而为Terahertz频带中的特定频率提供作为开/关开关的行为。该装置与金属的表面微机械加工过程兼容,以及用于大型和柔性薄片过滤器的滚动印刷图案化。

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