Magnetically-actuated MEMS cat's eye retroreflectors for optical identification

摘要

We present a MEMS tunable cat's eye retroreflector consisting of a rotational concave reflecting micromirror which provides the modulation of the optical retroreflection intensity. Magnetic beads are attached to this rotatable unit to enable magnetic actuation. The magnetically-actuated mirror achieves a large tilt angle. The tilt angle of the concave micromirror of the cay's eye retroreflector can change from 0° to 12°, with the retroreflection efficiency varying from 19% to 5%.