Lamellar grating interferometer FTIR spectroscopy and its applications: A review

摘要

In the recent years, Fourier transform infrared (FTIR) spectroscopy have been used in multiple applications such as identification of sample mixtures of organic and inorganic compounds for both solids and liquids, identification of polymers and polymer blends, thin film analysis, gas detection, Quality control, disease diagnosis such as cancer and many more. Important features of these methods are the relative ease with which measurements can be performed and fast response. There are several limitations to the conventional FTIR, such as robust structural design that compromises mobility and portability, slow response and low efficiency. These limitations are overcome in the MEMS (Micro Electro Mechanical System) based FTIR spectroscopy. This paper outlines the design, working and theory of the MEMS based LGI FTIR spectroscopy. This paper will briefly explain the advantage of LGI over Michaelson's model and also will cover some of the wide variety of application in commercial, military and medical field.