Lamellar grating interferometer having stress-dispersible support structure

摘要

The present invention relates to a lamella grating interferometer capable of being employed in a Fourier transform infrared (FTIR) spectrometer, the interferometer including a reflective surface in a circular shape and provided with a fixed portion including fixed mirrors and a movable portion including movable mirrors that are arranged with the fixed mirrors in a crossing manner to form a lamella structure with the fixed mirrors, a plurality of driving units disposed at outside the reflective surface and configured to apply driving forces for moving the movable portion, and a plurality of driving arms connecting the driving units to the movable portion of the reflective surface, respectively, and configured to move the movable portion in response to the driving forces applied by the driving units, wherein each of the plurality of driving arms is formed in a structure of repeating a preset bent shape plural times.