LAMELLAR GRATING INTERFEROMETER HAVING STRESS-DISPERSIBLE SUPPORT STRUCTURE

摘要

The present invention relates to a lamella grating interferometer which is applicable to a Fourier transform infrared (FTIR) spectrometer and capable of further improving resolution of the FTIR spectrometer. The lamella grating interferometer includes: a reflective surface having a circular shape and provided with a fixed portion including fixed mirrors and a movable portion including movable mirrors that are arranged with the fixed mirrors in a crossing manner to form a lamella structure with the fixed mirrors; a plurality of driving units disposed at an outside the reflective surface to provide driving forces for moving the movable portion; and a plurality of driving arms for connecting the driving units to the movable portion of the reflective surface, respectively, to move the movable portion according to the driving forces provided by the driving units, wherein each of the driving arms has a structure of repeating a preset bent shape plural times.;COPYRIGHT KIPO 2018