Characterization of Cu-BTA organic complexes on Cu during Cu CMP and post Cu cleaning

摘要

It is expected that different chemical treatment can produce various copper surface such as Cu_2O (as received), Cu (acetic acid treated) and CuO (acetic acid and hydrogen peroxide treated). BTA tends to be well adsorbed onto aceitc acid treated surface and grown with dissolution of copper which occurs in acetic acid treated copper suface because it it unstable due to lack of oxygen. On the other hands, hydrogen peroxide treated surface has much more CuO which prevent formation of Cu-BTA complex.