ANN approach for analysis of actuation voltage behavior of RF MEMS capacitive switches

摘要

RF MEMS switches applications in communication systems have been increased in the recent time, creating a need for reliable and accurate switch models. This paper deals with the switch models based on the artificial neural networks. In particular, a model relating the switch actuation voltage and the switch geometry is considered. The model allows fast and efficient analysis of switch actuation voltage behavior, requiring significantly shorter time for the same analyses than standard mechanical simulators. The change of actuation voltage with the tolerances in the bridge dimensions is studied as well.