Electro Static Discharge (ESD) one real life event: Physical impact and protection challenges in advanced CMOS technologies

摘要

The main purpose of this paper is to give an overview of Electro-Static Discharge (ESD) event with its impacts on advanced CMOS technologies. Afterwards, a discussion will be on ESD elementary devices and how to provide an efficient ESD network protection for System On Chip (SOC). These solutions are obtained according to the ESD window of the planar technology on bulk or Fully Depleted (FD) SOI. Thus it will be possible to imagine what could be the next challenges for an ESD protection.