300mm+ factory layout design and innovations for advanced semiconductor manufacturing

摘要

In conclusion, the study has applied AHP method to compare and to define the weighting of factors in a factory macro layout design. The results pointed out process flow, process time, contamination control rule and safety rule are the critical factors. Thus, from macro layout design stage, layout design team needs to consider process flow and process time by different technology nodes because those have great impact on manufacturing performance [3]. In addition to operation related issue, factory layout design also needs to focus on safety & risk related issue such as defining escape path, tool move-in path or other ergonomics issues.