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Failure Analysis of a MEMS Micro-Injector Printing Head

机译:MEMS微型注射器印刷头的故障分析

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摘要

Thermal bubble micro-injectors are being widely used in inkjet printing applications. The reason for the thermal bubble micro-injector to remain dominant in consumer applications is because of its high performance, low cost, and good reliability [1]. The fabrication of a micro-electromechanical-system (MEMS) based thermal micro-injector requires very precise assembly of various components to form the micro-fluidic structure. The micro-injector printing head reported in this paper employs twin bubbles as a virtual chamber neck to eject fluid [2]. An additional thick nozzle plate is electroplated to provide robust support for stable droplet ejection [3]. Further, this thick nozzle plate enhances heat dissipation of this micro-injector to achieve higher printing speed.
机译:热气泡微型喷射器广泛用于喷墨印刷应用。热气泡微喷射器在消费者应用中保持优势的原因是其高性能,成本低,可靠性良好[1]。微机电系统(MEMS)的热微喷射器的制造需要非常精确地组装各种部件以形成微流体结构。本文报道的微型喷射器印刷头采用双气泡作为虚拟室颈部以喷射流体[2]。电镀额外的厚喷嘴板以提供稳定的液滴喷射的鲁棒支持[3]。此外,该厚喷嘴板增强了该微喷射器的散热,以实现更高的印刷速度。

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