FABRICATION OF CeO_2/Al MULTILAYER THIN FILMS AND THE THERMAL BEHAVIOR

摘要

Cerium dioxide (CeO_2) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO_2 and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.