Study on the Auto-leveling Adjustment Vibration Isolation System for the Ultra-Precision Machine Tool

摘要

The requirement of the vibration isolation system for ultra-precision machine tool was extremely stringent. However, most of the isolation systems currently cannot meet the requirement. Therefore, it is urgently needed to design a new vibration isolation system to fulfill the strict vibration capability required by ultra-precision machine tool. In this paper the structure and principle of the conventional vibration isolation systems composed of air springs were first elucidated thoroughly. Based on these knowledge, we have designed a vibration isolation system with the function of auto-leveling adjustment for a home-made ultra-precision machine tool. The capability of vibration isolation system was validated by an experimental method, in which acceleration-frequency curves were recorded. And post data processing including the analyzing the cut-off frequency and amplitude attenuation were followed. The experimental results demonstrated that the air spring vibration isolation system designed in this paper has the capability to effectively isolate the vibration from the ground: it has a higher attenuation ratio for vibration with a frequency beyond 3 Hz, which preferably meet the vibration isolation requirement of the ultra-precision machine tool.