Vibration isolation device, lithographic apparatus, and method for adjusting a vibration isolation system

摘要

A vibration isolation device is provided that enables improved vibration isolation performance. The present invention is a vibration isolation device VI configured to support a structure ST, and includes an air mount AM having a base portion BP and a vibration isolation portion VIP installed in a reference structure; An inverted pendulum device IP, the lower end of the inverted pendulum device is installed in the vibration isolation portion of the air mount, and the upper end of the inverted pendulum device supports the structure to be supported. A vibration isolation device is provided that includes a stiffness adjustment device SA configured to adjust. [Selection] Figure 2