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Measurement of the metal nanometer layer parameters on dielectric substrates using photonic crystals based on the waveguide structures with controlled irregularity in the microwave band

机译:基于微波频带控制不规则性的光子结构使用光子晶体测量介电基板上的金属纳米层参数

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摘要

The results of investigations of the possibility of utilization of microwave photonic crystals with tunable irregularity instead of a “quarter-wave” dielectric layer for measurement of parameters of metal nanometer layers on dielectric substrates are presented. It has been shown that tuning the irregularity in the periodical structure of a photonic crystal allows one to tune the range of measurable metal layer’s thickness from 1 till 500 nm.
机译:提出了用于测量用于测量介电基板上的金属纳米层参数的可调谐不规则性的微波光子晶体的可能性的研究结果。已经表明,在光子晶体的周期性结构中调整不规则性允许一个人调节可测量的金属层的厚度范围从1到500nm。

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