Study on the Influence of RF Power on Inductively Coupled Plasma Ion Source Injector Gas

摘要

Aiming at the spectral analysis instrument with inductively coupled plasma as excitation source, it is significant to study the influence of RF power on the optimum flow rate of injector gas. In this work, the two-dimensional axisymmetric model of ICP was established, and the magnetohydrodynamic equations were then solved by the finite element method. It found that under the experimental conditions (auxiliary gas 0.5 L/min, cooling gas 15 L/min), the transition flow rate of injector gas is 0.3 L/min, and the change of RF power has no effect on it. It is also found that the optimal flow rate of injector gas is 0.6-1.4 L/min under the condition of 1000 W, 0.7-1.5 L/min with 1200 W and 0.8-1.6 L/min with 1400W.