Selective Area Laser Deposition Joining of Aluminum Oxide

摘要

Selective area laser deposition (SALD) is a chemical vapor deposition technique used to deposit ceramic material. The technique allows localized deposition in the area of the laser spot; complex depositions can be achieved through the use of a computer control program. It is possible to free form fabricate arbitrary shapes. In particular by defining the space between two work pieces as the envelope for deposition, it is possible to form a monolithic joint. The use of a trimethylaluminum and diethyl ether precursor system is explored as a means of depositing aluminum oxide. The alumina is used as joint fill material for alumina SALD joining.