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Selective aluminum oxide film deposition
Selective aluminum oxide film deposition
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机译:选择性氧化铝膜沉积
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摘要
Methods of depositing films are described. Specifically, methods of depositing metal oxide films are described. A metal oxide film is selectively deposited on the metal layer relative to the dielectric layer by exposing the substrate to an organometallic precursor followed by exposure to an oxidizing agent.
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