SCANNING ATOM-PROBE ANALYSIS OF CARBON-BASED MATERIALS

摘要

The new type of an atom probe with a minute funnel-shaped extraction electrode was named as a scanning atom probe (SAP) because the electrode scans over a flat specimen surface and confines the high field required for the field evaporation of surface atoms at an apex of a small cusp on a specimen [1,2]. The introduction of the electrode have made possible to mass analyze a wide range of materials that hardly obtain a tip with an extremely sharp apex. Accordingly, various non-metallic materials including silicon [3,4], graphite, CVD diamond, carbon nano tubes (CNT) [4-6], polythiophene [7] and organic molecules were mass analyzed [8]. The mass analysis of the CNT and the organic molecules suggests that the development of 3D-SAP with higher mass resolution and a light source which allows to irradiate various wave lengths is required. Based on the results of recent mass analysis of CNT and organic molecules, the structure of a new 3D-SAP will be described.