Electrostatic bending actuators with a liquid filled nanometer scale gap

摘要

We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an insulating, high dielectric constant deformable medium in the electrode gaps that enhances the generated force per unit-applied volt performance. The study demonstrates that small volumes of liquids (microfluidics/nanofluidics) can be inserted into micro and nanoelectromechanical systems (MEMS/NEMS) to enhance systems' performances up to 2.75.