HOLLOW LAME MODE MEMS MASS SENSORS WITH 10 PPB-RANGE STABILITY FOR PARTICLES COUNTING AND WEIGHING IN FLUID

摘要

This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 7 femtograms. The sensors performances show a one-fold improvement compared to previous alike structures - 10,000-range Q factor and ppb-range frequency stability. These devices are connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package. These performances, reached in ambient conditions whether the embedded channel is filled with air or water, make the devices potentially amenable to individual particles metrology from a few 10 nm up to the μm diameter range.