CuO nanowire gas sensors for CO detection in humid atmosphere

摘要

In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm–30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.