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Direct bonding of alumina substrate with copper heat sink in air assisted by ultrasonic vibrations for high power LEDs devices

机译:大功率LED器件中的超声振动辅助下,氧化铝基板与空气中的铜散热器的直接粘合

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With the trend of high power, high luminance in the industries of solid-state lighting, the difficulty of heat dissipation gets remarkable. Thermal interfaces in packages are usually the drawbacks or hinders for heat dissipation due to the wide use of high-thermal-conductivity materials. Ceramics, such as alumina, AlN et al. are the cases. In this paper, the copper heat sink was directly bonded with the alumina substrate by a Zn-Al filler with an ultrasonic-assisted bonding method. Different from a DBC (direct bonded copper) substrate process, robust bonds were fabricated through such a direct and simple bonding method. The interfaces at both the alumina/filler and the filler/Cu are good and with no obvious defects under scanning electron microscope (SEM). The bond ratio was above 95%. Wetting and reacting at the two interfaces were verified. Shear tests showed that the strength reaches above 65 MPa. Compared with traditional methods for interconnections of thermal interfaces, here we proposed a robust and rapid bonding one.
机译:随着固态照明行业中大功率,高亮度的发展趋势,散热的难度越来越大。由于高导热性材料的广泛使用,封装中的热界面通常是散热的弊端或障碍。陶瓷,例如氧化铝,AlN等。的情况。在本文中,铜散热器通过超声辅助粘合方法通过Zn-Al填料与氧化铝基板直接粘合。与DBC(直接键合铜)基板工艺不同,通过这种直接而简单的键合方法可以制造牢固的键合。在扫描电子显微镜(SEM)下,氧化铝/填料和填料/ Cu的界面均良好,且无明显缺陷。结合率高于95%。验证了两个界面上的润湿和反应。剪切试验表明强度达到65 MPa以上。与传统的热接口互连方法相比,我们在此提出了一种健壮且快速的键合方法。

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