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MODELING AND SIMULATION OF THE ULTRASONIC WIRE BONDING PROCESS

机译:超声钢丝键合工艺的建模与仿真

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Ultrasonic wire bonding is an indispensable process in the manufacturing of semiconductor components. It is used for interconnecting the silicon die to e.g. connectors in the housing or to other semiconductors in complex components. In high power applications, such as wind turbines, locomotives or electric vehicles, the thermal and mechanical limits of interconnects made from aluminum are nearing. The limits could be overcome using copper wire bonds, but their manufacturing poses challenges due to the harder material, which leads to increased wear of the bond tools and to less reliable production. To overcome these drawbacks, adaptation of process parameters at runtime is employed. However, the range of parameter values for which a stable process can be maintained is very small, making it necessary to compute suitable parameters beforehand. To this end, and to gain insights into the process itself, the ultrasonic bonding process is modeled. The full model is composed of several partial models, some of which were introduced before. This paper focuses on the modularization of the full model and on the interaction of partial models. All partial models are presented, their interaction is shown and the general outline of the simulation process is given.
机译:超声波引线键合是在半导体部件制造中的不可缺少的过程。它用于将硅芯片互连至例如硅芯片。壳体中的连接器或复杂部件中的其他半导体。在高功率应用中,例如风力涡轮机,机车或电动车辆,由铝制互连的互连的热和机械限制接近。可以使用铜线键来克服限制,但由于较硬的材料,它们的制造造成挑战,这导致粘合工具的磨损和生产不太可靠的生产。为了克服这些缺点,采用在运行时处于处理参数的适应。然而,可以保持稳定过程的参数值的范围非常小,因此必须预先计算合适的参数。为此,并向过程本身深入了解,超声波键合过程进行了建模。完整模型由几种部分模型组成,其中一些部分以前介绍过。本文重点介绍了全模型的模块化和部分模型的相互作用。提出了所有部分模型,显示了它们的交互,并给出了仿真过程的一般轮廓。

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