首页> 外文会议>IEEE Electronics Packaging Technology Conference >Improving the cleaning process in copper wire bonding by adapting bonding parameters
【24h】

Improving the cleaning process in copper wire bonding by adapting bonding parameters

机译:采用粘接参数改善铜线键合中的清洁过程

获取原文

摘要

Changing manufacturing technologies or material in well-known processes has to be followed by an adaption of process parameters. In case of the transition from aluminum wire to copper wire in heavy wire bonding, the adaption effort is high due to the strongly different mechanical properties of the wire. One of these adaption aspects, apart from wire material, is the existent oxide layers on wire and substrate. The ductile aluminum oxide is not influencing the bonding process much, because it is supposed to break apart in case of plastic deformation The lubricating copper oxide layer has to be removed before micro welds can develop. Therefore, in this paper, experiments are carried out at low frequency to determine the friction energy needed to abrade the copper oxide layer of wire and substrate, which is indicated by an increase in the resulting friction coefficient. The friction energy per contact area to remove the interfering layers at low frequency is compared to the real bonding process working at 58 kHz. In addition, a theoretical concept is being described to get a grasp of the occurring mechanism. In the end a proposal is given how to set bonding parameters to get the cleanest surfaces with the installed bond tool.
机译:在众所周知的过程中改变制造技术或材料必须随后进行过程参数的适应。如果从铝线转换到重线键合中的铜线,因此由于线的强烈不同的机械性能,适应性努力高。除线材外,这些适应方面之一是导线和基板上的存在的氧化物层。延性氧化铝不影响粘合过程很大,因为在塑性变形的情况下应该分开,在微焊缝发生之前必须去除润滑氧化铜氧化物层。因此,在本文中,实验以低频率进行,以确定磨损线和基板的氧化铜层所需的摩擦能,这通过增加的摩擦系数的增加表示。将每个接触区域以低频去除干扰层的摩擦能量与在58kHz下工作的真实粘合过程进行比较。此外,正在描述理论概念以掌握发生的机制。最后,提出了如何设置绑定参数以使用已安装的键合工具获取最新的曲面。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号