For more than 30 years now silicon solid state X-ray detectors have been the de facto standard in energy-dispersive X-ray spectrometry (EDS) on scanning electron microscopes and similar instruments. The technology has matured and the development has currently almost reached its physical limits. The most advanced detectors of this type are silicon drift detectors (SDD). They show resolutions around 121 eV for Mn-Kα which is very close to the theoretical limit (Fano limit) of about 119 eV. The throughput capability of several 100 kcps is more than adequate for most analytical conditions.
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