Microfabrication of W-band folded waveguide slow wave structure using DRIE and UV-LIGA technology

摘要

The recent progress of manufacturing folded waveguide slow wave structures using deep reactive ion etching (DRIE) technology and UV-LIGA, and the main fabrication process are briefly presented with an emphasis on fabrication of the prototypical W band serpentine trench. With the optimal fabrication parameters, the W band folded waveguide slow wave structure with the beam tunnel is fabricated. In this paper, we also report a two-step UV-LIGA to fabricate the W band serpentine trench.