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Adhesion work analysis by molecular modelling and wetting angle measurement

机译:分子建模和润湿角度测量的粘附工作分析

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摘要

The molecular modelling was be applied in order to calculate the work of adhesion between solutions of water, isopropyl alcohol (IPA) and silicon. The work of adhesion was calculated by using two computational methods based on experiment as well as numerical simulations. The method of wetting angle in case of the molecular modelling was used in order to compare simulation results with with the wetting angle experimental results. The main aim of the work was to make a comparison between the achieved values of the work of adhesion using simulations and the experiment. In comparison to the previously reported results [1], the current goal was to continue the research in order to improve and apply the developed method for surfactants, which are used in a process of silicon etching. Better understanding of adhesion phenomena can result in improvement of etching and the same can lead to the quality improvement of MEMS devices, as well as reduce their production cost. This work continues the previous research in that area where wetting angle and other methods where used to determine the adhesion work between IPA and silicon.
机译:应用分子建模以计算水,异丙醇(IPA)和硅溶液之间的粘附工作。通过使用基于实验的两种计算方法以及数值模拟来计算粘合性的工作。使用在分子建模的情况下润湿角度的方法,以便将模拟结果与润湿角度实验结果进行比较。该工作的主要目的是使用模拟和实验进行粘合性工作的粘合性值的比较。与先前报道的结果相比,目前的目标是继续研究以改善和应用用于表面活性剂的开发方法,其用于硅蚀刻的过程中。更好地理解粘合现象可能导致蚀刻的改善,同样可以导致MEMS器件的质量改进,以及降低其生产成本。这项工作继续在该领域继续研究,其中润湿角度和用于确定IPA和硅之间的粘附工作的其他方法。

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