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Compensation of MEMS Gyroscope Drift Based on Amplitude Primary Oscillation Measurement

机译:基于幅度一次振荡测量的MEMS陀螺仪漂移补偿

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We present the experimental results of the temperature self-compensation in the RR-type force-feedback force micromechanical gyroscope (MMG). The self-compensation is based on the temperature dependence of micromechanical resonator Q-factor, which may determined by measurements of internal signals in the drive loop of MMG. For the MMG with repeatability of the temperature dependence of bias equal to 1-3°/s (in the working temperature range of -40 -+85°C) the self-compensation gives similar to compensation from embedded into ASIC temperature sensor improvement. The described self-compensation may be more efficient for the MMG with a better repeatability or/and at the rapid temperature change.
机译:我们提出了在RR型力反馈力微机械陀螺仪(MMG)中温度自补偿的实验结果。自补偿基于微机械谐振器Q因子的温度依赖性,这可以通过测量MMG驱动回路中的内部信号来确定。对于偏置与温度的关系的可重复性等于1-3°/ s(在-40-+ 85°C的工作温度范围内)的MMG,自补偿的补偿与嵌入式ASIC温度传感器改进中的补偿类似。所描述的自补偿对于具有更好的可重复性或/和在快速的温度变化下的MMG可能是更有效的。

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