A study on young's modulus of electroplated gold cantilevers for MEMS devices

摘要

This paper presents evaluation of the effective Young's modulus of electroplated gold micro-cantilevers. Young's modulus is one of the fundamental parameters to design MEMS (microelectromechanical systems) components. Gold electroplated MEMS structures can be used to develop highly-sensitive MEMS sensors, such as accelerometers. With a resonant frequency method, we evaluate gold-electroplated Ti/Au cantilevers by varying both the length and the width. The experimental results showed that the Young's modulus was dependent on the width, and it was found that the Young's modulus increased with an increase in the width, which would be useful to design MEMS devices.