RF MEMS filter based on one step of copper electroplating

摘要

A MEMS RF Filter on glass substrate has been designed, simulated, fabricated and tested. The fabrication process has been developed based on copper electroplating, which is compatible with the copper inductor fabrication process, so it can be integrated into LC filter. Finally, spiral capacitors with different dimensions and LC filters have been fabricated successfully. Then a detailed analysis of the frequency response of the filters is presented according to the test result from network analyzer.