Continuous Dielectrophoretic Separation in the Iterative Curves Using dc-Biased ac Electric Fields

摘要

This paper presents a novel high resolution micro-separator which is capable of separating submicron particles with low voltages. The curved part of serpentine micro-channel that causes performance deterioration in capillary electrophoresis (CE) due to the plug dispersion will be effectively used in our design for dielectrophoretic (DEP) separation. The results of theoretical analysis and finite element modeling and simulation show a great potential of the design. The device is fabricated by bonding a glass wafer and a silicon wafer with electrodes on the surface together with an SU-8 layer in between. The preliminary experimental result gives the proof of basic dielectrophoretic effect in the curve.