Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser

摘要

Hierarchical micro-nano structure surface on silicon is directly produced by femtosecond laser in air. The laser processing reduces the reflectance of silicon significantly in the studied wavelength range (0.25–1.1 µm). Mechanical durability of the micro-nano structure surface has been studied. It is indicated that wear is significantly reduced under water saturation lubrication. Moreover surface modification with Perfluoropolyether improves its mechanical durability.