Laser-Induced Self-Organized Periodic Nano-Hole/Nano-Ridge Structures on the Surface of Silicon Produced with a Tightly Focused Femtosecond Pulse Laser Beam

摘要

Periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by a scanning tightly focused beam of the femtosecond laser with wavelength of 800 nm, a repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures induced by one line scan which focus with a 20× focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of line scanning provided knowledge of the evolvement of the nano-hole and nano-ridge structures.