Staggered mode MEMS gyroscope

摘要

This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency trimming. The concept is applied on the design and analysis of fully decoupled gyroscope based on the SOI MUMPS process and operating around a resonance frequency of 5 kHz. The concept is extendable for multi-degree of freedom for wider bandwidth extension.