A novel design microstage based on piezoeletric actuation

摘要

In this paper, a newly modeled 3D MEMS piezoelectric actuated microstage has been designed and simulated using COMSOL Multiphysics based on finite element method (FEM). Piezoelectric actuation is most widely used for providing immediate output, small input voltage, high accuracy in positioning with required high frequency. The microstage is designed containing moonie structure which amplifies the actuation of PZT actuator. Two designs of microstage are presented for Micropositioning and Nanopositioning. During designing poly-silicon material is used as this material increases the displacement.