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Alloyed copper bonding wire with homogeneous microstructure

机译:具有均匀组织的合金铜键合线

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The new alloyed copper (Cu) wire exhibited homogeneous free air ball (FAB) formation and better electrochemical corrosion resistance than that of bare Cu wire. It also has comparable electrochemical corrosion resistance as palladium (Pd) coated Cu wire. The softness of the alloyed Cu wire and its FAB are uncompromised though the alloy composition is of 1N purity. This is attributed to the innovative process design to make the alloyed Cu wire properties close to bare Cu wire. The tensile behavior of alloyed Cu wire and grain structure of wire/FAB is also close to that of bare Cu wire for comparable and easy application. The looping performance is also observed to be similar to bare Cu wire and is within the defined dimensional tolerances required by the semiconductor packaging industries. In addition, it has a wider 2nd bond process window compared to bare Cu wire. On thermal ageing at 175°C for 2000hrs, the alloyed Cu wire bond showed no ball lift failure, wire break at neck or near to neck region, as expected. The rate of growth of intermetallics at the interface of alloyed Cu wire bond is slower than bare Cu wire bond and certain intermetallic phase is absent. The reaction rate calculated from Arrhenius plot showed lower value for an alloyed Cu wire bond than a bare Cu wire bond, which indicates slower interfacial diffusion with alloyed Cu wire bond. BHAST testing of molded device using green mold compound and bonded with alloyed Cu wire showed no failure until 168hrs at 130°C under +20V biased voltage.
机译:与裸露的铜线相比,新的合金化铜(Cu)线表现出均匀的自由空气球(FAB)形成和更好的耐电化学腐蚀性能。它还具有与钯(Pd)涂层铜丝相当的耐电化学腐蚀性能。尽管合金成分的纯度为1N,但合金Cu线及其FAB的柔软性丝毫不受影响。这归因于创新的工艺设计,使合金化的铜丝性能接近裸铜丝。合金铜线的拉伸性能和线/ FAB的晶粒结构也接近裸铜线,从而可比较且易于使用。还观察到回路性能类似于裸铜线,并且在半导体封装工业所需的定义尺寸公差之内。另外,与裸露的铜线相比,它具有更宽的第二 键合工艺窗口。如预期的那样,在175°C的温度下热老化2000小时后,合金化的铜丝焊合没有出现提球故障,在颈部或靠近颈部区域的焊丝断裂。在合金化的铜丝键合界面处金属间化合物的生长速率比裸露的铜丝键合界面慢,并且缺少某些金属间相。根据Arrhenius曲线计算得出的反应速率显示,合金化的铜丝键合值比裸露的铜丝键合值低,这表明与合金化的铜丝键合的界面扩散较慢。使用生模塑料并用合金铜线粘合的成型设备的BHAST测试显示,直到在130°C和+ 20V偏置电压下运行168小时后,测试才发生故障。

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