Comparison of Dimensional Measurements of Microparts Made Using Deep x-ray Lithography (LIGA): First Results

摘要

Deep x-ray lithography (x-ray LIGA) allows the production of high aspect ratio polymer structures with near perfect sidewall verticality and optical quality surface roughness. These structures can be used as templates for mass production of metal or ceramic micro-scale parts. Measuring such microstructures, for instance, 2 mm tall metal gears with external diameters of 1 mm or less, is difficult. To test different techniques and compare their results, a comparison has been initiated. A set of artefacts manufactured by x-ray LIGA will be sent to a number of organisations for 3D measurements. Different techniques (contact CMM, focus variation microscopy, confocal microscopy) will be used. The various artefacts cover a range of dimensions. The first results based on measurements from two contact CMMs of different design and specification are presented in this paper.