The article is devoted to the formalization of investigation processes of substances by means of the X-ray fluorescence analysis (XRF). The research is aimed at solving the problem of automation of the analytical investigations in the XRF, which suppose to increases the productivity of the analyst and the accuracy of determining the concentration of elements in samples. Decomposition of information processes has been represented in the IDEF0 standard as a hierarchy of the core activities. Based on the decomposition the information model of the domain is developed. The model is represented as UML-diagrams adapted to MDA (Model Driven Architecture) based generative programming tools. These tools allow one to transform the model automatically into a skeleton of information system for XRF techniques automation.
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