Fluorescent X-ray analyzer, fluorescent X-ray analysis method, and fluorescent X-ray analysis program

摘要

The present invention has been made to obtain a fluorescent X-ray analyzer and the like capable of easily performing analysis of a sample including materials in the form of a multiple layer in the depth direction of the sample at low cost without a need of a skilled technique and time. A fluorescent X-ray analysis method according to the present invention that performs analysis of materials in a sample including different materials in the form of a multiple layer analyzes the materials by irradiating the sample with an X-ray to detect an fluorescent X-ray; estimates a processing amount for the sample based on a result of the analysis; and applies processing to the sample based on the processing amount estimated in the processing amount estimation step.