Localized Temperature Stability in A Multilayer LTCC Package

摘要

Low temperature cofired ceramic (LTCC) is a multilayer3D packaging, interconnection, and integrationtechnology. One of the advantages of LTCC is the abilityit affords to integrate passive components via the cofiringprocesses. For LTCC modules with embedded resonatorfunctions targeting high frequency applications, thetemperature coefficient of resonant frequency (τf) is acritical parameter. The base dielectrics of commercialLTCC systems have a τf in the range -50 ～ -80 ppm/°C.This study explores a method to achieve zero or near zeroτf embedded resonators by incorporating τf compensatingmaterials locally into a multilayer LTCC structure.Chemical interactions and physical compatibility betweenthe τf modifiers and the host LTCC dielectrics areinvestigated. A stripline (SL) ring resonator with nearzero τf is demonstrated in a non-zero τf commercialLTCC.