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Comparison of Gold and Copper Wire Bonding on Aluminum and Nickel- Palladium-Gold Bond Pads for Automotive Application

机译:汽车应用铝和镍-钯-金键合焊盘上金铜键合的比较

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New automotive requirements expect plastic packages to survive higher operating temperatures with extendedthermal duration. Mission profiles for under-the-hood and transmission application historically specified minimalduration at maximum junction temperature, such as 50 total hours at 150C, while keeping most of the total operatingduration at lower temperatures. Further module integration and more stringent environmental requirements pushmodules and thus plastic packages closer to the heat source. As such, new mission profiles include more than 3500total hours at 150°C. To satisfy new automotive requirements, plastic packages must meet AEC Grade 0 or higher.One key limitation of the conventional plastic package is the use of gold bond wire on aluminum bond pad. Au-Alintermetallic degradation due to intermetallic transformation in high temperature storage condition remains the mainreliability concern. More reliable intermetallic systems have been proposed that change the wire material and/or thebond pad metallization. An alternative wire material to gold, copper, has many benefits including low cost, highelectrical and thermal conductivities and excellent reliability with aluminum pad metallization. Pad re-metallizationusing nickel/palladium, nickel/gold or nickel/palladium/gold over aluminum bond pad or copper bond pad offers anoble and reliable metal interconnect. This study focused on evaluating Au and Cu wire bonding on low-K-copperwafers having two types of bonding surfaces, the conventional aluminum pad and aluminum pad re-metallized withelectroless nickel / electroless palladium / immersion gold. Ni thickness ranging from 1μm to 3μm was evaluated.Defects on as-plated Ni/Pd/Au bond pads such as color difference and surface roughness were determined to be dueto nodule growth and plating non-uniformity. Wire bonded strip-level thermal aging was conducted to compare thehigh-temperature performance of the four interconnect types. Packages underwent extensive reliability stressconditions. Cross-sectioning through the ball bonds was also conducted to examine the welding region between theball bond and bond pad. Defects in plating and wire bonding processes causing package reliability failures wereidentified. Recommendations for plating and wire bonding processes were derived to ensure high quality andreliable interconnect exceeding AEC grade 0 requirements.
机译:汽车行业的新要求要求塑料封装能够在更高的工作温度下承受更长的使用寿命 热持续时间。引擎盖和变速箱应用的任务配置文件历史上指定为最低 在最高结温下的持续时间,例如150°C下总共50小时,同时保持大多数总工作时间 在较低温度下的持续时间。进一步的模块集成和更严格的环境要求推动 模块,从而使塑料包装更靠近热源。因此,新的任务配置文件包括3500多个 在150°C下的总小时数。为了满足新的汽车要求,塑料包装必须满足AEC等级0或更高等级。 常规塑料封装的一个关键限制是在铝键合垫上使用金键合线。金铝 在高温存储条件下,由于金属间相变而导致的金属间降解仍然是主要的 可靠性问题。已经提出了更可靠的金属间体系,该体系可改变线材和/或 键合焊盘金属化。金,铜的替代电线材料具有许多优点,包括低成本,高成本 铝垫金属化的导电性和导热性以及出色的可靠性。垫重新金属化 在铝焊盘或铜焊盘上使用镍/钯,镍/金或镍/钯/金可提供 高贵可靠的金属互连。这项研究的重点是评估低K铜上的Au和Cu引线键合 晶片具有两种类型的键合表面,传统的铝垫和铝垫经过重新金属化处理 化学镍/化学钯/浸金。评估了1μm至3μm的Ni厚度。 确定是由于镀镍/钯/金键合焊盘上的缺陷(例如色差和表面粗糙度)造成的 结节生长和镀层不均匀。进行了引线键合带材级的热老化,以比较 四种互连类型的高温性能。封装承受着广泛的可靠性压力 情况。还进行了通过球焊的横截面检查,以检查焊缝之间的焊接区域。 球形键合和键合垫。电镀和引线键合过程中的缺陷导致封装可靠性失败,原因是 确定。提出了有关电镀和引线键合工艺的建议,以确保高质量和高品质。 可靠的互连,超过AEC 0级要求。

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