Silicon Pressure Sensor Reliability Intensifying Test Qualitative Analysis

摘要

This paper focuses on the silicon pressure sensor, and reliability of intensifying test for piezoresistive pressure sensor failure mode and failure mechanism carries on the investigation and study, and temperature stepping stress test and random vibration stepping test, based on traditional equipment of random vibration stepping test, make the product design and process defect to exposure, the results of analysis and put forward relevant measures for improvement.