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High Speed Digital Imaging Using Gray Level with Micromirror Array

机译:使用微镜阵列灰度级进行高速数字成像

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In recent years the PCB industry has increasingly turned to digital, or maskless, imaging techniques in order meet demands for tighter registration between layers. Many of these techniques, including laser direct imaging (LDI), rely on a "dot-matrix" style exposure technique that uses "binary" pixels and small pixel or dot spacing to achieve the required resolution. This results in limitations in write speed and throughput, since many small pixels or dots must be written over a relatively large area PCB substrate. A patented gray level technique1 based on a commercially available digital micro-mirror device (DMD) achieves required resolutions with a relatively large projected pixel size, and thus offers a higher speed alternative to conventional digital techniques. Gray level, or dose control as a function of panel position can also provide some degree of compensation for minor processing or development artifacts that are known to recur in the same areas of a panel.
机译:近年来,PCB工业已越来越多地转向数字或无掩模成像技术,以满足对层之间更紧密配准的需求。这些技术中的许多技术(包括激光直接成像(LDI))都依赖于“点矩阵”样式的曝光技术,该技术使用“二进制”像素和较小的像素或点间距来实现所需的分辨率。由于必须在相对较大面积的PCB基板上写入许多小像素或点,因此导致写入速度和吞吐量受到限制。基于市售数字微镜设备(DMD)的获得专利的灰度级技术1以相对较大的投影像素尺寸实现了所需的分辨率,因此可以提供比常规数字技术更高的速度。灰度或作为面板位置的函数的剂量控制还可以为已知在面板的相同区域中再次出现的较小的处理或显影伪像提供一定程度的补偿。

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