基于数字微镜阵列的平顶光束空间整形

摘要

为了满足激光光斑质量高、扫描快速的目的，采用数字微镜阵列和误差扩散法对单平顶和多平顶的光束整形原理仿真，利用680nm激光建立了实验系统，并进行了光束整形验证。采用光束填充因子、光场调制度、均方根误差3种评价参量对整形结果进行评价，并对采用数字微镜阵列进行光束整形的能量利用率进行了测量和分析。结果表明，单平顶和多平顶整形的光束填充因子由整形前的36.1%分别提高到62.3%和56.7%；光场调制度由73.3%分别降到25.6%和30.3%。利用该光束空间整形方法，可得到高质量的多平顶光束，在快速激光扫描领域有一定的应用价值。%In order to satisfy the applications with high quality beams and fast scanning, the formation of single flat-top and multiple flat-top beams were simulated by digital micromirror device and error diffusion method. An experimental setup with 680nm laser was built to validate the model. The beam shaping result was evaluated by using beam fill factor, light field modulation factor, root mean square error as parameters, and the energy utilization rate of beam shaping based on digital micromirror array was measured and analyzed. The results show that beam fill factors increase from 36. 1% to 62. 3%(single), 56. 7%(multiple) respectively, while light field modulation factors decrease from 73. 3% to 25. 6%(single),30. 3%(multiple) respectively. Spatial shaping results show that the multiple flat-top beams are valuable in high quality beams and fast scanning.